JPS6212536Y2 - - Google Patents
Info
- Publication number
- JPS6212536Y2 JPS6212536Y2 JP1982173486U JP17348682U JPS6212536Y2 JP S6212536 Y2 JPS6212536 Y2 JP S6212536Y2 JP 1982173486 U JP1982173486 U JP 1982173486U JP 17348682 U JP17348682 U JP 17348682U JP S6212536 Y2 JPS6212536 Y2 JP S6212536Y2
- Authority
- JP
- Japan
- Prior art keywords
- polishing
- polisher
- polished
- glassy
- shape
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1982173486U JPS5978054U (ja) | 1982-11-18 | 1982-11-18 | 研摩装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1982173486U JPS5978054U (ja) | 1982-11-18 | 1982-11-18 | 研摩装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5978054U JPS5978054U (ja) | 1984-05-26 |
JPS6212536Y2 true JPS6212536Y2 (en]) | 1987-04-01 |
Family
ID=30377918
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1982173486U Granted JPS5978054U (ja) | 1982-11-18 | 1982-11-18 | 研摩装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5978054U (en]) |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5590262A (en) * | 1978-12-26 | 1980-07-08 | Nippon Telegr & Teleph Corp <Ntt> | Method of manufacturing polisher |
-
1982
- 1982-11-18 JP JP1982173486U patent/JPS5978054U/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS5978054U (ja) | 1984-05-26 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP3645528B2 (ja) | 研磨方法及び半導体装置の製造方法 | |
US6454644B1 (en) | Polisher and method for manufacturing same and polishing tool | |
US5101602A (en) | Foam backing for use with semiconductor wafers | |
JP4234991B2 (ja) | 情報記録媒体用ガラス基板の製造方法及びその製造方法によって製造される情報記録媒体用ガラス基板 | |
WO1995006544A1 (en) | Backing pad for machining operations | |
JPS63162155A (ja) | 研磨のための工作物取付け方法 | |
US20110189505A1 (en) | Method for manufacturing glass substrate for magnetic recording medium | |
US5876273A (en) | Apparatus for polishing a wafer | |
JPH10180599A (ja) | 薄板ワーク平面研削装置及び方法 | |
TW520320B (en) | Optimal offset, pad size and pad shape for CMP buffing and polishing | |
US2024303A (en) | Glass polisher | |
JP3510036B2 (ja) | 半導体装置の製造方法 | |
JPS6212536Y2 (en]) | ||
US6478977B1 (en) | Polishing method and apparatus | |
US1651181A (en) | Tool for treating ophthalmic lenses and process of making same | |
JPH06208980A (ja) | 研磨装置 | |
JP2000343440A (ja) | 研磨砥石及び研磨砥石の製造方法 | |
JP3528501B2 (ja) | 半導体の製造方法 | |
JPH058051Y2 (en]) | ||
US3488895A (en) | Method for surfacing glass | |
JP2002273657A (ja) | Cmp加工用ドレッサ | |
JPH10217076A (ja) | ディスク基板の加工方法、加工装置および該加工方法に使用する外周刃砥石 | |
WO1993015878A1 (en) | Abrading device and abrading method employing the same | |
KR20010040249A (ko) | 연마장치 및 그 장치를 사용한 반도체제조방법 | |
JPH02303759A (ja) | ウェハ周縁部の研磨方法 |